Novel Differential Surface Stress Sensor for Detection of Chemical and Biological Species

A miniature sensor consisting of two adjacent micromachined cantilevers (a sensing/reference pair) is developed for detection of chemical and biological species. A novel interferometric technique is utilized to measure the differential bending of sensing cantilever with respect to reference. Presence of species is detected by measuring the differential surface stress associated with adsorption/absorption of chemical species on sensing cantilever. Surface stress associated with formation of alkanethiol self-assembled monolayers (SAMs) on the sensing cantilever is measured to characterize the sensor performance. Disciplines Biochemical and Biomolecular Engineering | Computer-Aided Engineering and Design | Process Control and Systems Comments This is a conference proceeding from 2007 MRS Fall Meeting 1052 (2007): 171, doi:10.1557/ PROC-1052-DD05-10. Posted with permission. This conference proceeding is available at Iowa State University Digital Repository: http://lib.dr.iastate.edu/me_conf/87 'e resistance measurements can be used to achieve in films of Ah03 were found to have the requisite n of gas analytes with thin film gas sensors. !Xcellent platform for this method of sensing, :produced in close proximity. In addition, the 1sor and compensator is easily accomplished o directly measure the drift reduction when 1re typical resistance mode. In addition, methods toying multiple sensors and compensators, for are being investigated. mcial support from the National Research l.L. Shomaker, J.A. Small, M. Gaitan and P. ). Res. 31, 279 (1998). d S. Semancik, Sens. Actuators B 53, 24 (1998). [artensson, M. Sjostrom and M. Holmberg, J. nand F. Winquist, Meas. Sci. Technol. 12, 1348 11. Chim. Acta 472, 99 (2002). Actuators B 96, 354 (2003). anova, X. Correig and E.L. Hines, Electron. Lett. C. Persaud, Sens. Actuators B 98,305 (2004). B 104, 249 (2005). Mater. Res. Soc. Symp. Proc. Vol. 1052 © 2008 Materials Research Society 1052-DD05-10 Novel Differential Surface Stress Sensor for Detection of Chemical and Biological Species Kyungho Kang, and Pranav Shrotriya Mechanical Engineering Department, Iowa State University, 2025 Black Engineering Building, Ames, lA, 50011